Method of depositing nanometer scale particles
AssigneeHitachi Europe Limited
InventorsToshihiko Sato, Haroon Ahmed
Life of this patent
Estimating the term…
Abstract
Nanometre scale particles (3) e.g. of Au are deposited on a Si substrate (2) with a SiO.sub.2 surface layer (1) provided with receptor sites (4) of a first electrical polarity by treatment with APTMS solution. The Au particles (3) have a surface charge (5) of a second opposite polarity e.g from surface adsorbed citrate ions, such that they are attracted to the surface sites on the substrate. The deposited Au particles are then released from the surface sites such that the particles move over the substrate and coalesce into a low dimensional aggregated structure. The aggregated structure may form at a surface irregularity on the surface of the substrate. The structure may be used in a quantum electronic device such as a single electron transistor.
Claims27
A method of depositing nanometer scale particles having a mean diameter of less than 10 nm. on a substrate, comprising:
- providing receptor sites of a first electrical polarity on a surface of the substrate, the particles having a surface charge of a second opposite polarity such that they are attracted to the receptor sites on the substrate, and
- releasing the particles from the receptor sites such that the particles move over the substrate and coalesce into an aggregated structure.
A method of depositing nanometer scale particles having a mean diameter of less than 10 nm on a substrate, comprising:
- providing receptor sites of a first electrical polarity on a surface of the substrate, the particles having a surface charge of a second opposite polarity such that they are attracted to the receptor sites on the substrate, and
- releasing the particles from the receptor sites such that the particles move over the substrate and coalesce into an aggregated structure wherein the substrate includes a topographical irregularity, and the released particles aggregate at the irregularity.
A method of depositing nanometer scale particles having a mean diameter of less than 10 nm on a substrate, comprising:
- providing receptor sites of a first electrical polarity on a surface of the substrate, the particles having a surface charge of a second opposite polarity such that they are attracted to the receptor sites on the substrate,
- releasing the particles from the receptor sites such that the particles move over the substrate and coalesce into an aggregated structure, and
- treating the particles on the substrate with a fluid which reduces their surface charge and releases them from said receptor sites.
A method of depositing nanometer scale particles having a mean diameter of less than 10 nm on a substrate, comprising:
- providing receptor sites of a first electrical polarity on a surface of the substrate, the particles having a surface charge of a second opposite polarity such that they are attracted to the surface receptor sites on the substrate,
- releasing the particles from the surface receptor sites such that the particles move over the substrate and coalesce into an aggregated structure, and
- providing electrodes on the substrate electrically coupled to the aggregated structure.
Dependencies are inferred from the claim text.