Back to results
US 5,994,750 AGranted
Microstructure and method of forming the same
AssigneeCanon Kabushiki Kaisha
InventorTakayuki Yagi
Life of this patent
Estimating the term…
Abstract
There is provided a microstructure comprising a substrate, support members, a lever and an electrode formed on the lever is characterized in that said support members support said substrate and said beam and/or the electrode section with a void interposed therebetween and an electrode is formed on the lower surface of said beam. There are also provided a method of forming such a microstructure and an electrostatic actuator having a beam that is displaced by applying a voltage to the electrodes of the actuator.
Claims17
A microstructure comprising:
- a substrate;
- a support member formed on said substrate;
- and
- a beam suspended from said support member in a manner to be separated from said substrate by an air space, said beam having an electrode on a bottom surface thereof;
- wherein said support member is comprised of a member formed of a thin metal film with a portion of said support member attached to a top surface of said beam and a portion directly attached to said substrate.
2 more elements
A microstructure comprising:
- a substrate;
- a support member formed on said substrate;
- and
- a beam suspended from said support member in a manner to be separated from said substrate by an air space, wherein said beam is made of a thin film of an insulating material and has an electrode on a bottom surface thereof;
- wherein said support member is comprised of a member formed of a single material with a portion of said support member attached to a top surface of said beam and a portion directly attached to said substrate.
2 more elements
An electrostatic actuator comprising:
- a substrate;
- a drive electrode and a fixed electrode formed on said substrate;
- a beam suspended from said support member in a manner to be separated from said substrate by an air space, said beam having a movable electrode located so as to be opposite to said drive electrode;
- wherein said support member is formed of only one member of an electroconductive material, and is comprised of a portion attached to a reverse surface of said beam to said surface opposite said substrate and a portion directly attached to said fixed electrode, and said fixed electrode and said movable electrode are electrically connected to each other by said support member.
1 more element
Dependencies are inferred from the claim text.