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US 5,993,766 AGranted
Gas source and dispensing system
AssigneeAdvanced Technology Materials, Inc.
InventorsGlenn M. Tom, James V. McManus
Life of this patent
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AssigneeAdvanced Technology Materials, Inc.
InventorsGlenn M. Tom, James V. McManus
Estimating the term…
A system for the storage and delivery of a sorbable fluid, comprising a storage and dispensing vessel containing a sorbent material having sorptive affinity for the sorbable fluid, and from which the fluid is desorbable by pressure-mediated and/or thermally-mediated desorption, wherein the sorbent material is functionally enhanced by a reagent which alters the binding energy of the fluid to the sorbent. In a preferred aspect, the system is arranged for storage and delivery of B.sub.2 H.sub.6, in which the sorbent material has sorptive affinity for B.sub.2 H.sub.6 and is effective when B.sub.2 H.sub.6 is contacted with the sorbent to convert B.sub.2 H.sub.6 to a sorbed .BH.sub.3 form, which is desorbable by pressure-mediated desorption and/or thermally-mediated desorption to release B.sub.2 H.sub.6 from the sorbent, and means for selectively discharging desorbed B.sub.2 H.sub.6 from the vessel
A system for the storage and delivery of B.sub.2 H.sub.6, comprising a storage and dispensing vessel containing a sorbent material having sorptive affinity for B.sub.2 H.sub.6 and effective when B.sub.2 H.sub.6 is contacted with the sorbent to convert B.sub.2 H.sub.6 to a sorbed .BH.sub.3 form which is desorbable by pressure mediated desorption and/or thermally-mediated desorption to release B.sub.2 H.sub.6 from the B.sub.2 H.sub.6 from the vessel, and further comprising sorbed .BH.sub.3 on the sorbent material.
A system for the storage and delivery of a sorbable fluid, comprising a storage and dispensing vessel containing a sorbent material having sorptive affinity for the sorbable fluid, and from which the fluid is desorbable by pressure-mediated and/or thermally-mediated desorption, wherein the surface of the sorbent material is functionally enhanced by a reagent which alters the binding energy of the fluid to the sorbent by providing surface functionalities with which the sorbable fluid interacts to form surface complexes from which the fluid is desorbable by said pressure-mediated and/or thermally-mediated desorption, and further comprising in said storage and dispensing vessel surface complexes of said sorbable fluid on said sorbent material.
A method of storing and selectively dispensing B.sub.2 H.sub.6, comprising providing a vessel containing a sorbent surface having Lewis base functional groups thereon, and introducing B.sub.2 H.sub.6 to the vessel so that the sorbent surface effects the reaction:
Dependencies are inferred from the claim text.