US 5,989,342 A · Apparatus for substrate holding

Abstract

A substrate holding apparatus holds a rotating substrate without idly rotating the substrate and keeps the substrate in proper balance while the substrate is rotated. In a revolvable holding member, a column-shaped holding part is disposed on a top surface of a column-shaped supporting part, at an eccentric position with respect to a rotation axis of the supporting part. The revolvable holding member is supported by a rotation base for free rotation, and linked to a magnet holding part which incorporates a permanent magnet. On the other hand, a ring-shaped magnet which is disposed in a processing liquid collecting cup is freely driven by an air cylinder in a vertical direction. As the ring-shaped magnet is moved upward or downward and crosses a predetermined line as viewed in a positional relationship relative to the permanent magnet, which is at a height where the permanent magnet is disposed, the direction of a magnetic line of flux of the ring-shaped magnet is reversed. As a result, the direction of the revolving force which acts upon the permanent magnet is reversed, whereby the revolvable holding member holds or releases a substrate.

Claims22

Dependent claims

An apparatus for holding a substrate, which is used in a unit for processing said substrate by rotating said substrate, said apparatus comprising:

a) a rotational stage for rotating around a first axis;
b) fixed holding means for restricting a position of said substrate by being in contact with an edge of said substrate, said fixed holding means being fixed on said rotational stage;
c) movable holding means for holding said substrate, said movable holding means being movably supported on said rotational stage and connected with first magnetic means;
d) second magnetic means for generating a magnetic field and applying said magnetic field to said first magnetic means, said second magnetic means being arranged outside of said rotational stage;
and
e) inversion means for inverting direction of said magnetic field at said first magnetic means;
wherein said movable holding means is capable of holding said substrate in contact with said edge of said substrate and releasing said substrate in response to inversion of said direction of said magnetic field.

4 more elements

An apparatus for holding a substrate, which is used in a unit for processing said substrate by rotating said substrate, said apparatus comprising:

a) a rotational stage for rotating around a first axis;
b) a fixed holder restricting a position of said substrate by being in contact with an edge of said substrate, said fixed holder being fixed on said rotational stage;
c) a movable holder holding said substrate, said movable holder being movably supported on said rotational stage and connected with a first magnetic device;
d) a second magnetic device generating a magnetic field and applying said magnetic field to said first magnetic device, said second magnetic device being arranged outside of said rotational stage;
and
e) an inversion device inverting direction of said magnetic field at said first magnetic device;
wherein said movable holder is capable of holding said substrate in contact with said edge of said substrate and releasing said substrate in response to inversion of said direction of said magnetic field.

4 more elements

Dependencies are inferred from the claim text.

Apparatus for substrate holding

Life of this patent

Apparatus for substrate holding

Life of this patent

Abstract

Claims22