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US 5,988,524 AGranted
Suck back valve with sucking amount control mechanism
AssigneeSMC Corporation
InventorsKatsuhiko Odajima, Kenichi Kurosawa
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Abstract
A suck back valve is equipped with a second valve by which a flow amount of a pressurized fluid, which is sucked by a third diaphragm, is electrically controlled based on an output of activation and deactivation signals from a main controller. The suck back valve further includes an encoder which detects a displacement amount of the third diaphragm, and outputs a detection signal thereof to the main controller.
Claims8
A suck back valve comprising:
- a connector having a fluid passage and formed with a first port on one end and a second port formed on another end thereof;
- a suck back mechanism for sucking a fluid inside of said fluid passage by a negative pressure action of a flexible member displaced in accordance with a pilot pressure;
- an ON/OFF valve for opening and closing said fluid passage in accordance with an action of said pilot pressure;
- a controller having therein disposed a sucking amount control mechanism for electrically controlling a flow amount of a fluid which is sucked by said suck back mechanism;
- a displacement detection means for detecting a displacement amount of said flexible member and outputting a detection signal thereof to said controller,
- wherein said sucking amount control mechanism includes a spring member which presses said flexible member by an elasticity of the spring member, and a plurality of electromagnetic valves for adjusting a pilot pressure supplied to said suck back mechanism by activation and deactivation signals issued from said controller, wherein the displacement amount of said flexible member is controlled by equalizing said pilot pressure and a biasing strength of said spring member in accordance with a pressure-adjusting action of said electromagnetic valves.
3 more elements
Dependencies are inferred from the claim text.