Aqueous stripping and cleaning compositions
AssigneeAshland Inc.
InventorsIrl E. Ward, Francis Michelotti
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Abstract
An aqueous stripping composition comprising a mixture of a polar amine, an organic or inorganic amine and a corrosion inhibitor which is gallic acid, its ester or analog. The stripping composition is effective to strip photoresists, residues from plasma process generated organic, metal-organic materials, inorganic salts, oxides, hydroxides or complexes in combination with or exclusive of organic photoresist films at low temperatures without redepositing any substantial amount of metal ions.
Claims10
In an aqueous stripping and cleaning composition for removing organic and inorganic matter comprising an admixture of at least about 10% by weight water, a water soluble polar solvent and an organic amine, the improvement which comprises the admixture with an effective amount of a corrosion inhibitor of the general formula:
- ##STR3## wherein R is lower alkyl or hydrogen.
Dependencies are inferred from the claim text.