US 5,987,985 A · Angular velocity sensor

Abstract

A multi-axial angular velocity sensor for detecting angular velocity components about respective coordinate axes in a three-dimensional cooridnate system has a flexible substrate having flexibility. A fixed substrate is disposed so as to oppose the flexible substrate a predetermined distance above the flexible substrate. An oscillator is fixed on a lower surface of the flexible substrate. A sensor casing supports the flexible substrate and the fixed substrate and accommodates the oscillator therewithin. A plurality of lower electrodes is provided on an upper surface of the flexible substrate and a plurality of upper electrodes are provided on a lower surface of the fixed substrate and disposed at positions respectively opposite to the lower electrodes. A piezoelectric element is disposed between the lower electrodes and the upper electrodes. An a.c. signal is applied across a pair of the lower and upper electrodes that are opposite to each other thereby to oscillate the oscillator in respective coordinate axial directions for the detecting of a potential produced across a pair of the lower and upper electrodes that are opposite to each other, thereby to detect displacements in respective coordinate axial directions of the oscillator.

Claims27

Dependent claims

A multi-axial angular velocity sensor for detecting angular velocity components about respective coordinate axes in a three-dimensional cooridnate system, comprising:

a flexible substrate having flexibility;
a fixed substrate disposed so as to oppose the flexible substrate with a predetermined distance therebetween above the flexible substrate;
an oscillator fixed on a lower surface of the flexible substrate;
a sensor casing for supporting the flexible substrate and the fixed substrate and accommodating the oscillator therewithin;
a plurality of lower electrodes provided on an upper surface of the flexible substrate;
a plurality of upper electrodes provided on a lower surface of the fixed substrate and disposed at positions respectively opposite to the lower electrodes;
a piezoelectric element disposed between the lower electrodes and the upper electrodes;
means for applying an a.c. signal across a pair of the lower and upper electrodes that are opposite to each other, thereby to oscillate the oscillator in respective coordinate axial directions;
and
means for detecting a potential produced across a pair of the lower and upper electrodes that are opposite to each other, thereby to detect displacements in respective coordinate axial directions of the oscillator.

7 more elements

An angular velocity sensor for detecting an angular velocity component about a coordinate axis in a three-dimensional coordinate system, comprising:

a flexible substrate having flexibility;
a fixed substrate disposed so as to oppose the flexible substrate with a predetermined distance therebetween above the flexible substrate;
an oscillator fixed on a lower surface of the flexible substrate;
a sensor casing for supporting the flexible substrate and the fixed substrate and accommodating the oscillator therewithin;
a lower electrode provided on an upper surface of the flexible substrate;
an upper electrode provided on a lower surface of the fixed substrate and disposed at a position opposite to the lower electrode;
a piezoelectric element disposed between the lower electrode and the upper electrode;
excitation means for moving the oscillator in a first coordinate axis direction;
displacement detecting means for detecting a displacement of the oscillator in a second coordinate direction based on a potential produced across the upper electrode and the lower electrode so that an angular velocity component about a third coordinate axis is obtained based on the detected displacement.

6 more elements

An angular velocity sensor for detecting an angular velocity component about a coordinate axis in a three-dimensional coordinate system, comprising:

a piezoelectric element having an upper electrode on an upper surface and a lower electrode on a lower surface, the upper electrode and the lower electrode being opposite each other;
a fixed substrate fixed to an upper surface of the upper electrode;
an oscillator located under the piezoelectric element so that a movement of the oscillator is transmitted to the piezoelectric element;
a sensor casing for supporting the fixed substrate and accommodating the piezoelectric element and the oscillator therewithin;
excitation means for moving the oscillator in a first coordinate axis direction;
displacement detecting means for detecting a displacement of the oscillator in a second coordinate direction based on a potential produced across the upper electrode and the lower electrode so that an angular velocity component about a third coordinate axis is obtained based on the detected displacement.

3 more elements

Dependencies are inferred from the claim text.

Angular velocity sensor

Life of this patent

Angular velocity sensor

Life of this patent

Abstract

Claims27