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US 5,986,388 AGranted
Field-emission cold-cathode electron gun having emitter tips between the top surface of gate electrode and focusing electrode
AssigneeNEC Corporation
InventorHideo Makishima
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Abstract
A field-emission cathode comprises a substrate having a conductive surface, a gate electrode and a focusing electrode overlying the substrate with insulation layers interposed therebetween, a plurality of cavities formed by penetrating the gate electrode, focusing electrode and insulation layers, and an emitter formed in each of the cavities on the substrate for emission of an electron beam. The emitter has tip located at a level between the gate electrode and the focusing electrode, which receive therebetween a signal for modulating the electron beam at a high frequency.
Claims7
A field-emission cathode electron gun comprising:
- a substrate having a conductive surface;
- a first insulation film, a gate electrode, a second insulation film and a focusing electrode consecutively formed on said conductive surface and defining a plurality of cavities therein;
- and
- an emitter formed on said conductive surface in each of said cavities to emit an electron beam from a tip of said emitter,
- said tip of said emitter being disposed at a level between a top surface of said gate electrode and said focusing electrode, said gate electrode and focusing electrode receiving therebetween a signal for modulating said electron beam and further wherein said gate electrode has an annular projection disposed on and above said gate electrode encircling a corresponding one of said cavities.
2 more elements
A field-emission cathode electron gun comprising:
- a substrate having a conductive surface;
- a first insulation film, a gate electrode, a second insulation film and a focusing electrode consecutively formed on said conductive surface and defining a plurality of cavities therein;
- and
- an emitter formed on said conductive surface in each of said cavities to emit an electron beam from a tip of said emitter,
- said tip of said emitter being disposed at a level between a top surface of said gate electrode and said focusing electrode, said gate electrode and focusing electrode receiving therebetween a signal for modulating said electron beam, and further
- wherein said gate electrode and focusing electrode implement a pair of distributed parameter transmission lines.
3 more elements
A field-emission cathode electron gun comprising:
- a substrate having a conductive surface;
- a first insulation film, a gate electrode, a second insulation film and a focusing electrode consecutively formed on said conductive surface and defining a plurality of cavities therein;
- and
- an emitter formed on said conductive surface in each of said cavities to emit an electron beam from a tip of said emitter,
- said tip of said emitter being disposed at a level between a top surface of said gate electrode and said focusing electrode, said gate electrode and focusing electrode receiving therebetween a signal for modulating said electron beam, further comprising a pair of distributed parameter transmission lines connected to said gate electrode and focusing electrode, respectively.
2 more elements
A field-emission cathode electron gun comprising:
- a substrate having a conductive surface;
- a first insulation film, a gate electrode, a second insulation film and a focusing electrode consecutively formed on said conductive surface and defining a plurality of cavities therein;
- and
- an emitter formed on said conductive surface in each of said cavities to emit an electron beam from a tip of said emitter,
- said tip of said emitter being disposed at a level between a top surface of said gate electrode and said focusing electrode, said gate electrode and focusing electrode receiving therebetween a signal for modulating said electron beam;
- and
- further comprising a third insulation film disposed between said focusing electrode and said second insulation film, wherein said third insulation film has a depression for exposing said plurality of cavities.
4 more elements
A field-emission cathode electron gun comprising:
- a substrate having a conductive surface;
- a first insulation film, a gate electrode, a second insulation film and a focusing electrode consecutively formed on said conductive surface and defining a plurality of cavities therein;
- and
- an emitter formed on said conductive surface in each of said cavities to emit an electron beam from a tip of said emitter,
- said tip of said emitter being disposed at a level between a bottom surface of said gate electrode and said focusing electrode, said gate electrode and focusing electrode receiving therebetween a signal for modulating said electron beam and further wherein said gate electrode has an annular projection disposed on and above said gate electrode encircling a corresponding one of said cavities.
2 more elements
An electron beam device having a field-emission cathode, the cathode comprising:
- a field-emission cathode electron gun comprising:
- a substrate having a conductive surface;
- a first insulation film, a gate electrode, a second insulation film and a focusing electrode consecutively formed on said conductive surface and defining a plurality of cavities therein;
- and
- an emitter formed on said conductive surface in each of said cavities to emit an electron beam from a tip of said emitter,
- said tip of said emitter being disposed at a level between a top surface of said gate electrode and said focusing electrode, said gate electrode and focusing electrode receiving therebetween a signal for modulating said electron beam and further wherein said gate electrode has an annular projection disposed on and above said gate electrode encircling a corresponding one of said cavities.
3 more elements
Dependencies are inferred from the claim text.