US 5,986,264 AGranted

Ion beam preparation device for electron microscopy

AssigneeBal-Tec A.G.

InventorWolfgang Grunewald

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Abstract

The invention relates to a ion beam preparation device for electron microscopy which is capable of observing the preparation process with the aid of a scanning electron microscope (3) and hence deliberately operate on the sample (4). The device is fitted with a multi-axis sample bench, at least on ion source (1, 2), a scanning electron microscope (3) with electron detectors (7, 9, 8) to image secondary electrons (SE), back-scatter electrons (RE) and transmitted electrons (TE), an electron source as a discharger for isolating samples and a light microscope (5). The ability to observe the etching process in situ permits precise monitoring of the etching stage, e.g. the degree of thickness reduction of the sample, at high resolution and, with the aid of a control device (19), it is possible automatically to terminate the thinning process to precise instructions.

Claims11

Dependent claims

Ion beam preparation device for processing specimens (4) used in electron microscopy, comprising a vacuum chamber (10) and at least one ion source (1, 2) for bombarding a specimen (4) in a specimen holder (6) with noble gas ions for etching the specimen, means for allowing stationary ion beam impingement on the specimen (4) at a predefined angle, means for rotating and for tilting the specimen holder (6) into a fixed position, the vacuum chamber (10) having an SEM column (3) with an axis (14) aimed at the specimen (4), a first scanning electron microscope (SEM) detector (7) with means for imaging the specimen surface during operation of the ion source for bombarding the specimen, and a second SEM detector (8) with means for imaging the specimen in TSEM mode by registering electrons transmitted through the specimen during operation of the ion source for bombarding the specimen, the first and second detectors imaging the specimen continuously during the etching with noble gas ions.

Dependencies are inferred from the claim text.