Selected high thermal novolaks and positive-working radiation-sensitive compositions
AssigneeOlin Microelectronic Chemicals, Inc.
InventorsAndrew J. Blakeney, Sanjay Malik, Medhat A. Toukhy, Joseph Sizensky
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AssigneeOlin Microelectronic Chemicals, Inc.
InventorsAndrew J. Blakeney, Sanjay Malik, Medhat A. Toukhy, Joseph Sizensky
Estimating the term…
A high thermal alkali-soluble novolak binder resin, comprising the addition-condensation reaction product of a phenolic mixture with at least one aldehyde source, the feedstock of the phenolic mixture for the reaction comprising: (1) about 25 to about 40 weight percent of the phenolic mixture being a monomer selected from meta-cresol 2,5-xylenol or the combination thereof; (2) about 50 to about 70 weight percent of the phenolic mixture being para-cresol; and (3) about 3 to about 20 weight percent of the phenolic mixture being acetamidophenol; all percentages based on the weight of total phenol monomer feedstock. The invention is also directed to a positive working photoresist made from the composition.
A high thermal alkali-soluble novolak binder resin, comprising the addition-condensation reaction product of a phenolic mixture with at least one aldehyde source, the feedstock of said phenolic mixture for said reaction comprising:
A positive-working photoresist composition, comprising the admixture of:
Dependencies are inferred from the claim text.