Light absorbing polymers
AssigneeClariant Finance (BVI) Limited
InventorsShuji Ding, Dinesh N. Khanna, Ping-Hung Lu, Jianhui Shan, Ralph R. Dammel, Dana L. Durham, M. Dalil Rahman, Iain McCulloch
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Abstract
The present invention relates to a novel polymer suitable for use as an antireflective coating or as an additive in photoresist for absorption of reflected light. The novel polymer comprises at least one unit containing a dye that absorbs from about 180 nm to about 450 nm and at least one unit that contains no aromatic funtionality. The polymer is soluble in organic solvents, preferrably solvents of low toxicity, or it may be soluble in water, which may additionally contain other water miscible organic solvents.
Claims7
A polymer which may be suitable for use as an antireflecting coating in photolithography, comprising:
- a) at least one dye unit having the structure:
- ##STR7## where, R.sub.1 -R.sub.4 are independently hydrogen, alkyl, alkoxy, halo, cyano, divinylcyano, alkyl ether, aryl, aralkyl, amino, hydroxy, fluoroalkyl, nitro, amide, alkyl amide, sulfonic acid, sulfonate ester, carboxylic acid, carboxylic ester or alkali salts of carboxylic or sulfonic acids;
- X is R'C.dbd.CR', R' C.dbd.N or N.dbd.CR', where R' is H or alkyl;
- Y is aryl, aralkyl, heterocyclic or alkyl;
- m=1-3;
- and
- b) at least one comonomer unit of the formula, ##STR8## where, R.sub.6 -R.sub.9 are independently hydrogen, alkyl, alkoxy, halo, alkyl ether, amino, hydroxy, fluoroalkyl, amide, alkyl amide, carboxylic acid, carboxylic ester, sulfonic acid, sulfonic ester, alkali salts of carboxylic acid, alkali salts of sulfonic acid, crosslinking group or R.sub.8 and R.sub.9 combined to form an anhydride group.
A polymer which may be suitable for use as an antireflecting coating in photolithography, comprising:
- a) at least one dye unit having the structure:
- ##STR10## where, R.sub.1 -R.sub.4 are independently hydrogen, alkyl, alkoxy, halo, cyano, divinylcyano, alkyl ether, aryl, aralkyl, amino, hydroxy, fluoroalkyl, nitro, amide, alkyl amide, sulfonic acid, sulfonate ester, carboxylic acid, carboxylic acids ester or alkali salts of carboxylic or alkali salts of sulfonic acids;
- X is N.dbd.N,
- Y is alkoxy carbonylphenyl, acetylphenyl, acetamidophenyl, alkoxyphenyl, N-(2,4-dinitrophenyl)aminophenyl, 2-hydroxy-5-(ethyl sulfonyl)phenyl, hydroxysulfophenyl, alkali salts of hydrosulfophenyl, sulfonaphthalenyl or the alkali salts of sulfonaphthalenyl,
- m=1-3;
- and
- b) at least one comonomer unit of the formula, ##STR11## where, R.sub.6 -R.sub.9 are independently hydrogen, alkyl, alkoxy, halo, alkyl ether, amino, hydroxy, fluoroalkyl, amide, alkyl amide, carboxylic acid, carboxylic ester, sulfonic acid, sulfonic ester, alkali salts of carboxylic acid or alkali salts of sulfonic acid, crosslinking group or R.sub.8 and R.sub.9 combined to form an anhydride group.
Dependencies are inferred from the claim text.