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US 5,976,344 AGranted
Composition for electroplating palladium alloys and electroplating process using that composition
AssigneeLucent Technologies Inc.
InventorsJoseph Anthony Abys, Irina Boguslavsky, Heinrich K. Straschil
Life of this patent
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Abstract
An aqueous electroplating bath for the electrodeposition of palladium alloys in a mixed ligand system. A first ligand operates to form a complex of palladium and a second ligand functions to form a complex of another metal which brings the plating potentials of the two metals closer together. Palladium and the alloying metal thus exist as complexes with different structures.
Claims8
An aqueous palladium alloy electroplating bath consisting of:
- a metal consisting essentially of a palladium salt having a palladium electroplating reduction potential and an alloying metal salt selected from the group consisting of cobalt salts and iron salts having an alloying metal electroplating reduction potential, and
- a mixed ligand system, said mixed ligand system comprising a first ligand selected from the group consisting of ammonia, amines, diamines, polyamines and their derivatives, said first ligand present in amount effective to form a complex with said palladium salt and a second ligand selected from the group consisting of an acetate, a citrate, malonic acid, glutaric acid, citric acid, tartaric acid, oxalic acid, ethylenediamine, glycine and ethylenediaminetetraacetate, said second ligand present in an amount effective to form a complex with said alloying metal salt to bring said alloying metal electroplating reduction potential in a negative, less anodic, direction relative to said alloying metal electroplating reduction potential in the presence of said first ligand alone.
Dependencies are inferred from the claim text.