Process for operating a dry-compression vacuum pump as well as a suitable vacuum pump for implementation of this process
AssigneeLeybold Aktiengesellschaft
InventorsMonika Kuhn, Hartmut Kriehn, Rudolf Bahnen
Life of this patent
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Abstract
A process for operating a dry-compression vacuum pump with at least one pump chamber and at least one rotor driven by an electric motor, and to a vacuum pump suitable for this operating process. To reduce operational shutdowns for maintenance purposes without any risk to the pump, it is proposed that application-specific phenomena leading to deviations from the normal operating status or their effects be monitored and, after a predetermined deviation quantity has been attained at which operation of the vacuum pump could be adversely affected in future, steps be taken to remove the causes thereof.
Claims12
A method for monitoring deposition formation in a suction chamber of a dry-sealing vacuum pump, wherein said pump is connected to a vacuum chamber in which a vacuum process occurs, said pump having at least one rotor that is driven by a motor, the method comprising the steps of:
- monitoring an inlet pressure of a stage of said pump by means of a first pressure sensor in an inlet of said stage;
- monitoring an exhaust pressure of said stage of said pump by means of a second pressure sensor in an outlet of said stage;
- determining a ratio of said inlet pressure to said exhaust pressure;
- comparing said ratio to a predetermined threshold value;
- and
- generating a warning signal if said ratio exceeds said predetermined threshold value.
A method of monitoring deposition formation in a suction chamber of a dry-sealing vacuum pump, said pump being connected to a vacuum chamber in which a process occurs, said pump having at least one rotor and being driven by an electric motor, the method comprising the steps of:
- temporarily disconnecting said pump from said vacuum chamber;
- monitoring an ultimate pressure of said pump with said pump temporarily disconnected from said vacuum chamber;
- comparing said ultimate pressure to a threshold value;
- and
- generating a warning signal if said ultimate pressure is below said threshold value.
A method for monitoring deposition formation in an outlet channel of a dry-sealing vacuum pump, wherein said pump is connected to a vacuum chamber in which a vacuum process occurs, said pump having at least one suction chamber, at least one rotor that is driven by a motor, the method comprising the steps of:
- monitoring a pressure in an entry region of said outlet channel by means of a pressure sensor disposed within said outlet channel;
- comparing said pressure to a predetermined threshold value;
- and
- generating a warning signal if said pressure exceeds said predetermined threshold value.
A method for monitoring deposition formation in a silencer of a dry-sealing vacuum pump, that is connected to a vacuum chamber in which a vacuum process occurs, said pump having at least one suction chamber, at least one rotor, driven by a motor, the method comprising the steps of:
- monitoring a first pressure in an inlet region of said silencer;
- comparing said first pressure to a predetermined threshold value;
- and
- generating a warning signal if said first pressure exceeds said predetermined threshold value.
A method for monitoring deposition formation in a suction chamber of a dry-sealing vacuum pump, said pump being connected to a vacuum chamber in which a process occurs, said pump having at least one rotor and being driven by an electric motor, the method comprising the steps of:
- flowing an inert gas toward said suction chamber;
- monitoring a gas flow rate of said inert gas;
- comparing said gas flow rate to a threshold value;
- and
- generating a warning signal if said gas flow rate is below said threshold value.
A dry sealing vacuum pump a vacuum pump that is connected to a vacuum chamber in which a vacuum process occurs, said pump having at least one rotor driven by a motor, said pump comprising:
- a stage including a suction chamber;
- a first pressure sensor in an inlet of said stage, whereby an inlet pressure of said stage is monitored;
- a second pressure sensor in an outlet of said stage, whereby an exhaust pressure of said stage is monitored;
- determining means, connected to said first and second pressure sensors, for determining a ratio of said inlet pressure to said exhaust pressure;
- comparing means, connected to said determining means, for comparing said ratio to a predetermined threshold value;
- and
- means, connected to said comparing means, for generating a warning signal if said ratio exceeds said predetermined threshold value, therein indicating deposition formation in said suction chamber.
A dry sealing vacuum pump a vacuum pump that is connected to a vacuum chamber in which a vacuum process occurs, said pump having a suction chamber, said pump having at least one rotor driven by a motor, said pump comprising:
- means for temporarily isolating said pump from said vacuum chamber;
- measuring means for measuring a maximum pressure of said pump with said pump temporarily isolated from said vacuum chamber;
- comparing means, connected to said measuring means, for comparing said maximum pressure to a predetermined threshold value;
- and
- means, connected to said comparing means, for generating a warning signal if said maximum pressure is below said predetermined threshold value, therein indicating deposition formation in said suction chamber.
A dry sealing vacuum pump, said pump being connected to a vacuum chamber in which a process occurs, said pump having a suction chamber, an outlet channel, at least one rotor, and being driven by an electric motor, said pump comprising:
- a pressure sensor disposed within said outlet channel, whereby a pressure in an entry region of said outlet channel is monitored;
- comparing means, connected to said pressure sensor, for comparing said pressure to a threshold value;
- and
- means connected to said comparing means, for generating a warning signal if said pressure exceeds said threshold value, therein indicating deposition formation within said outlet channel.
A dry sealing vacuum pump, said pump being connected to a vacuum chamber in which a process occurs, said pump having a silencer, a suction chamber, an outlet channel, at least one rotor, and being driven by an electric motor, said pump comprising:
- first monitoring means for monitoring a first pressure in an inlet region of said silencer;
- first comparing means for comparing said first pressure to a threshold value;
- and
- signal means, connected to said first comparing means, for generating a warning signal if said first pressure exceeds said threshold value, therein indicating deposition formation in said silencer.
A dry sealing vacuum pump, said pump being connected to a vacuum chamber in which a process occurs, said pump having a suction chamber, said pump having at least one rotor and being driven by an electric motor, said pump comprising:
- flowing means for flowing an inert gas toward said suction chamber;
- determining means, connected to said flowing means, for determining a gas flow rate of said inert gas;
- comparing means, connected to said determining means, for comparing said gas flow rate to a threshold value;
- and
- means connected to said comparing means, for generating a warning signal if said gas flow rate is below said threshold value, wherein deposition formation in said suction chamber is indicated.
Dependencies are inferred from the claim text.