Sub-wavelength aperture arrays with enhanced light transmission
AssigneeNEC Research Institute, Inc.
InventorsThomas W. Ebbesen, Hadi F. Ghaemi, Tineke Thio, Peter A. Wolff
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Abstract
A metallic film has apertures located therein in an array arranged in a pattern so that when light is incident on the apertures, surface plasmons on the metallic film are perturbed resulting in an enhanced transmission of the light emitted from individual apertures in the array. The aperture array is used: to filter light of predetermined wavelength traversing the apertures, to collect light over a distance after traversing the apertures, to improve operation of near-field scanning optical microscopes, and to enhance light transmission through masks useable in photolithography.
Claims12
An apparatus for enhanced light transmission comprising:
- a metallic film;
- and
- an array of apertures in said film;
- said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array whereby incident light at a predetermined wavelength will perturb the metallic film in a surface plasmon energy band for enhancing transmission of light through individual apertures in said array.
An optical filter comprising:
- a metallic film;
- an array of apertures in said film;
- said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array whereby incident light at a predetermined wavelength will perturb the metallic film in a surface plasmon energy band for enhancing transmission of light through individual apertures in said array;
- and
- means for adjusting the angle of said array whereby when light is incident on said array at a predetermined angle only light of specific wavelength will travel through the apertures in said array.
A light collector comprising:
- a metallic film;
- an array of apertures in said film;
- said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array whereby incident light at a predetermined wavelength will perturb the metallic film in a surface plasmon energy band for enhancing transmission of light through individual apertures in said array;
- and
- optic fiber disposed in juxtaposition to said array of apertures so that light traveling through said apertures enters said fiber.
An apparatus for use in photolithography comprising:
- a metallic film;
- an array of apertures in said film;
- said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array whereby incident light at a predetermined wavelength will perturb the metallic film in a surface plasmon energy band for enhancing transmission of light through individual apertures in said array;
- and
- actuator means for causing said array to undergo motion relative to a photoresist coated substrate to be disposed in proximity to said array.
Dependencies are inferred from the claim text.