CVD process for coating the inside of hollow bodies
AssigneeSchott Glaswerke
InventorMarten Walther
Life of this patent
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Abstract
A process for CVD coating of a hollow body with a barrier layer, comprising measuring the temperature inside of the body by igniting plasma within said body with at least one ignition pulse and correlating the time between the ignition pulse and a pulse of light given off by plasma ignition, and a device for carrying out such a process.
Claims19
In a process for CVD coating the inside of a hollow body with a barrier layer comprising igniting plasma within said body with at least one ignition pulse, the improvement comprising monitoring the temperature inside of the body by correlating the time between the ignition pulse and a pulse of light given off by plasma ignition.
A CVD process for coating the inside of a hollow body with at least one barrier layer, whereby, before a coating phase, in which coating gas is introduced into the hollow body, the hollow body is heated in a heating phase using plasma, to a specified temperature, said heating phase comprising heating by
- a plasma-pulse process, in which the plasma is ignited by a timed sequence of ignition pulses, and
- during both the heating phase and the coating phase, the time correlation of the light pulses of the plasma is measured and analyzed with the ignition pulses, and the intensity of at least one emission line of the coating gas is measured.
Dependencies are inferred from the claim text.