Vacuum pump control system
AssigneeEbara Corporation
InventorsNobuharu Noji, Koichi Kido
Life of this patent
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Abstract
A vacuum pump control system is used for controlling a plurality of vacuum pumps comprising at least one type of cryopump, turbomolecular pump, cryoturbo pump, and dry pump such as a Roots type vacuum pump. The vacuum pump control system for controlling a plurality of vacuum pumps, comprises a host computer; a plurality of vacuum pump controllers connected respectively to said vacuum pumps; and a network control unit for transmitting information between the host computer and the vacuum pump controllers. The vacuum pump controllers are connected in parallel to the network control unit by respective communication lines.
Claims11
A vacuum pump control system for controlling a plurality of vacuum pumps, comprising:
- a host computer;
- a plurality of vacuum pump controllers connected respectively to said vacuum pumps;
- and
- a network control unit for transmitting information between said host computer and said vacuum pump controllers, said vacuum pump controllers being connected in parallel to said network control unit by respective communication lines.
A vacuum pump control system for controlling a plurality of vacuum pumps, comprising:
- a host computer;
- and
- a multi-controller connected between said host computer and said vacuum pumps for controlling said vacuum pumps,
- wherein said multi-controller has a plurality of detachable control modules for controlling said vacuum pumps.
Dependencies are inferred from the claim text.