Microdevice valve structures to fluid control
AssigneeXerox Corporation
InventorsDavid K. Biegelsen, Warren B. Jackson, Patrick C. P. Cheung, Mark H. Yim, Andrew A. Berlin
Life of this patent
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Abstract
A valve array system including microelectromechanical valves embedded in a dielectric substrate is disclosed. These microelectromechanical valves can be batch fabricated using resin impregnated dielectric laminates having photolithographically formed circuitry for electrical connections. Movable components of valves, including electromagnetic or electrostatically actuated membranes, flaps, or beams, can be formed from laminate material using sacrifice layers and etching.
Claims13
A valve comprising
- at least one laminate composed of a dielectric base material impregnated with a resin,
- a component movable with respect to the dielectric base material to control fluid flow, and
- a plurality of metallic electrical leads photolithographically formed on the laminate.
A valve array comprising
- at least one laminate substantially composed of a dielectric base material impregnated with a resin,
- an array of valves at least partially embedded in the laminate, and
- a plurality of metallic electrical connections photolithographically formed on the laminate and electrically connected to the array of valves.
A system for supporting an array of valved fluid jets comprising
- a fluid pressure source,
- a laminate having a dielectric base material and an impregnated resin, with a plurality of conduits defined in the laminate in contact with the fluid pressure source, and
- a plurality of electrically controlled electromagnetic valves, with at least some of the plurality of electromagnetic valves embedded in the conduits defined in the laminate to control fluid flow therethrough.
A system for supporting an array of valved fluid jets comprising
- a fluid pressure source,
- a laminate having a dielectric base material and an impregnated resin, with a plurality of conduits defined in the laminate in contact with the fluid pressure source, and
- a plurality of electrically controlled electrostatic valves, with at least some of the plurality of electrostatic valves embedded in the conduits defined in the laminate to control fluid flow therethrough.
Dependencies are inferred from the claim text.