Method for manufacturing a semiconductor component and automatic machine program generator therefor
AssigneeMotorola, Inc.
InventorsDavid Kerszykowski, Warren F. Higgins, Jerry A. Toogood, Robert C. Turner
Life of this patent
Estimating the term…
Abstract
An automated machine program generator (10) and a method for optimizing the manufacture of articles. The automated machine program generator (10) includes a data repository editor (11), a table parameter editor (13), and an optimizer editor (14). The data repository editor (11) collects data from various sources. The data is transformed and placed in a table (12). If necessary, the data in the table (12) is modified by the table parameter editor (13). The modified data is optimized by the optimizer editor (14) and transferred to a piece of equipment (15) for manufacturing the article.
Claims17
A method for controlling semiconductor manufacturing equipment, comprising the steps of:
- generating a run control file for a semiconductor component by using a bridge-translation program, wherein the bridge-translation program allows different programs to interact with each other, wherein the run control file is generated by a single keystroke;
- downloading the run control file to the semiconductor manufacturing equipment;
- and
- operating the semiconductor manufacturing equipment in accordance with the run control file that has been downloaded to manufacture a semiconductor component.
A method for automating run control files for equipment used in manufacturing a semiconductor component, comprising the steps of:
- generating a run control file for a semiconductor component by using a bridge-translation program, wherein the bridge-translation program allows different programs to interact with each other, and wherein the run control file is generated by a single keystroke that provides a parameter change to at least one data file;
- reformatting data in the run control file for use in a specified machine, thereby creating reformatted data;
- downloading the reformatted data to the specified machine;
- and
- using the reformatted data to fabricate the semiconductor component.
Dependencies are inferred from the claim text.