Method of inspecting crack in ceramic substrate
AssigneesSeiko Epson Corporation, NGK Insulators, Ltd.
InventorsMinoru Usui, Takahiro Katakura, Takaichi Wada, Motonori Okumura, Nobuo Takahashi, Natsumi Shimogawa, Keizo Miyata
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Abstract
A method of inspecting a crack in a ceramic substrate that is not exposed on the surface. The method can detect all cracks and make objective judgement possible by expressing the inspection result as numerical data. Conductors are disposed on both faces of a ceramic substrate, wherein one of the conductors is a conductive liquid; the insulation resistance value or an electric property dependent on the insulation resistance is measured with the conductive liquid or other conductors electrically connected to the conductive liquid which are used as electrodes.
Claims7
A method of inspecting a crack in a ceramic substrate comprising the steps of:
- disposing conductors on both faces of the ceramic substrate, one of the conductors being a conductive liquid and the other of the conductors having a plane electrically connected portion;
- and
- measuring by having said conductive liquid contact directly at least one surface of said ceramic substrate one of (i) an insulation resistance between the faces of the ceramic substrate and (ii) an electrical property dependent on the insulation resistance wherein the conductor having the plane electrically connected portion and one of the conductive liquid itself and a conductor electrically connected to the conductive liquid are used as electrodes.
A method of inspecting a crack in a ceramic substrate having a conductive film on at least one face thereof comprising the steps of:
- disposing conductive liquid on the face of the ceramic substrate opposite the face having a conductive film thereon, and
- measuring by having said conductive liquid contact directly at least one surface of said ceramic substrate one of (i) an insulation resistance between the faces of the ceramic substrate and (ii) an electrical property dependent on the insulation resistance wherein the conductive film and one of the conductive liquid itself and a conductor electrically connected to the conductive liquid are used as electrodes.
Dependencies are inferred from the claim text.