Automatic measuring apparatus having a switching means to generate an output signal only when a sensor is positioned at a predetermined space
AssigneeSpeedfam Corporation
InventorsTamotsu Kurita, Manabu Nagai
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AssigneeSpeedfam Corporation
InventorsTamotsu Kurita, Manabu Nagai
Estimating the term…
An automatic measuring apparatus is capable of measuring the thickness of a work piece with a high degree of precision. Distance data for carriers is removed from distance data representative of the distances between a pair of surface plates which are detected in a non-contact manner. An eddy current sensor mounted on a first surface plate detects a distance therefrom to a second surface plate and generates a corresponding analog voltage signal. When the eddy current sensor enters and exits a space between two adjacent carriers, voltage signals are generated. The voltage signals are processed to determine the voltage value of a digital voltage signal that has a maximum frequency or a maximum number of occurrences among the voltage signals being processed. The resultant determination is used to arrive at the work piece thickness.
An automatic measuring apparatus comprising:
Dependencies are inferred from the claim text.