US 5,969,473 A · Two-part field emission structure

Abstract

A two-part field emission structure, and a method for making such a structure, is described. A substrate is provided having a first conductive layer thereon, a first insulating layer over the first conductive layer, a second conductive layer over the first insulating layer, and an opening formed in the first insulating and second conductive layers. A sacrificial layer is formed over the second conductive layer. A bottom portion of the field emitter structure is formed in the opening, by vertical deposition of a conductive material, whereby a third conductive layer, having a collimated channel over the bottom portion, is formed over the sacrificial layer. The formation of the field emitter structure is completed by vertical deposition of a tip material on to the top of the bottom portion of the field emitter structure, whereby a top conductive layer is formed over the third conductive layer. Lastly, the sacrificial layer, the third conductive layer, and the top conductive layer are removed. An optional interface adhesion layer is formed between the bottom portion of the field emitter structure and the tip.

Claims4

Dependent claims

A two-part field emission structure comprising:

a sandwich structure comprising a second conductive layer over an insulating layer over a first conductive layer, on a substrate;
an opening in said sandwich structure;
a conductive conical base with a flat top surface, in said opening, which forms the base of said two-part field emission structure;
a tip formed on said flat top surface of said conductive conical base, which completes said two-part field emission structure, and wherein said tip is formed of a material having a work function of between about 0 and 5 eV., and is selected from the group consisting of crystalline diamond, tungsten, copper, niobium, hafnium, silicon carbide, titanium carbide, barium, tantalum nitride, cesium and cermet;
and
an interface adhesion layer over said conductive conical base and under said tip, wherein the interface adhesion layer is formed of a material selected from the group consisting titanium and chromium.

3 more elements

Dependencies are inferred from the claim text.

Two-part field emission structure

Life of this patent

Two-part field emission structure

Life of this patent

Abstract

Claims4