Back to results
US 5,969,470 AGranted
Charged particle source
AssigneeVeeco Instruments Inc.
InventorsBoris L. Druz, Alan V. Hayes, Victor Kanarov, Salvatore A. DiStefano, Emmanuel N. Lakios
Life of this patent
Estimating the term…
Abstract
A charged particle source applicable for etching, thin film deposition, or surface modification includes a conductive electrode for controlling the plasma potential and beam voltage, the electrode retaining long term conductivity during operation, such as by shielding or in situ cleaning during operation, and/or by being operated in pulse mode conditions capable of preventing charge accumulation in the source during ion extraction.
Claims31
A charged particle source comprising:
- a vessel defining an interior for containing a plasma, the plasma having a Debye length, the vessel including an inlet communicating with the interior of the vessel and connectable to a source of atoms, and an aperture through which a charged particle beam is dischargeable;
- an energy generator for communication with the atoms in the interior of the vessel and for effecting ionization of the atoms in the vessel and creating the plasma;
- an electrode assembly disposed in the interior of the vessel, the electrode assembly including a conductive electrode member connectable to a voltage source, the conductive electrode member including at least one cavity shielded from the plasma and direct impingement of involatile plasma product so as to inhibit formation of precipitates from the plasma on the conductive electrode member, the cavity having an opening greater than the Debye length;
- and
- an ion optics assembly disposed adjacent to the vessel aperture for accelerating plasma-generated charged particles having the same polarity as the conductive electrode member from the vessel while maintaining charged particles of the opposite polarity within the vessel.
2 more elements
A charged particle source comprising
- a vessel defining an interior for containing a plasma, the plasma having a Debye length, the vessel including an inlet communicating with the interior of the vessel and connectable to a source of atoms, and an aperture through which a charged particle beam is dischargeable;
- an energy generator for communication with the atoms in the interior of the vessel and for effecting ionization of the atoms in the vessel and creating the plasma;
- an ion optics assembly disposed adjacent to the vessel aperture, the assembly including first and second spaced apart conductive grid members having a plurality of apertures, said first grid member being in contact with the plasma and including portions defining a plurality of cavities shielded from the plasma and direct impingement of involatile plasma products so as to inhibit formation of precipitates from the plasma on the first grid member, said cavities having an opening greater than the Debye length, means for connecting said first grid member with a voltage source, the second conductive grid member being spaced apart from said first grid member, and means for connecting said second grid member to a voltage source of opposite polarity to said first grid member.
Dependencies are inferred from the claim text.