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AssigneeInternational Business Machines Corporation
InventorsWayne Isami Imaino, Anthony Juliana, Jr., Milton Russell Latta, Charles H. Lee, Wai Cheung Leung, Hal J. Rosen
Estimating the term…
A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In one embodiment of the invention, a disk is moved into an inspection subcompartment between a pair of air knives which blow partially ionized air onto the planar sides of the disk to remove loose particles adhering thereto. After the disk moves through the air knife streams, the two laser beams scan the two sides of the disk. Preferably the scan occurs after the air knives have been turned off and as the disk moves out of the inspection subcompartment. The subcompartment may optionally have an air source which forces air to flow out of the subcompartment to aid in maintaining a clean environment for inspection.
An apparatus for scanning two parallel planar surfaces of an object using a first laser beam (A-beam) having a first path and a second laser beam (B-beam) having a second path, comprising:
A method for scanning two parallel planar surfaces of an object using a first laser beam (A-beam) having a first path and a second laser beam (B-beam) having a second path, comprising the steps of:
Dependencies are inferred from the claim text.