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AssigneeFujitsu Limited
InventorsAkio Takemoto, Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Takamasa Satoh, Hideki Nasuno, Hidefumi Yabara, Kenichi Kawakami, Kiichi Sakamoto, Tomohiro Sakazaki, Isamu Seto, Masami Takigawa, Tatsuro Ohkawa
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A method of exposing a wafer to a charged-particle beam by directing to the wafer the charged-particle beam deflected by a deflector includes the steps of arranging a plurality of first marks at different heights, focusing the charged-particle beam on each of the first marks by using a focus coil provided above the deflector, obtaining a focus distance for each of the first marks, obtaining deflection-efficiency-correction coefficients for each of the first marks, and using linear functions of the focus distance for approximating the deflection-efficiency-correction coefficients to obtain the deflection-efficiency-correction coefficients for an arbitrary value of the focus distance. A device for carrying out the method is also set forth.
A method of exposing a wafer to a charged-particle beam by directing to said wafer said charged-particle beam deflected by a deflector, said method comprising the steps of:
A device for exposing a wafer to a charged-particle beam by directing to said wafer said charged-particle beam deflected by a deflector, said device comprising:
Dependencies are inferred from the claim text.