US 5,969,357 A · Scanning electron microscope and method for dimension measuring by using the same

Abstract

An electron beam which can transmit through part of a specimen and can reach a portion not exposing to the electron beam is irradiated and a scanning image is obtained on the basis of a signal secondarily generated from a portion irradiated with the electron beam. Dimension-measuring start and end points are set on the scanning image and a dimension therebetween is measured. A cubic model is assumed, the cubic model is modified so as to match the scanning image, and dimension measurement is carried out on the basis of a modified cubic model.

Claims20

Dependent claims

A method for forming an image of a specimen, comprising the following steps;

scanning a particle beam on a scanning field including the bottom of a deep hole or groove in the surface of the specimen, said deep hole or groove having an aspect ratio of at least 3, the particle beam scanned on the bottom of the deep hole or groove thereby generating charged particles from the specimen surface and from the bottom of the deep hole or groove;
detecting the charged particles generated from the specimen surface and from the bottom of the deep hole or groove by the scanning step;
and
displaying the scanning field including the specimen surface and the bottom of the deep hole or groove, based on the detected charged particles.

1 more element

Dependencies are inferred from the claim text.

Facts

Application

08/979,327Filed 26 Nov 1997 · continuation

Priority

JP 2-27225812 Oct 1990

Granted

19 Oct 1999

Term ends

Not estimatedThe source records don’t support an estimate.

Classification7 codes

G01B 15/00
Measuring arrangements characterised by the use of electromagnetic waves or particle radiation
G01B 15/04
Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma…
H01J 2237/2448
Detection characterized by the detecting means: secondary particle detectors
H01J 2237/24495
Detection characterized by the detecting means: signal processing, e.g. mixing of two or more signals

Family

Serial773,729Parent of this continuation-in-part · filed 9 Oct 1991

Serial039,705Parent of this continuation-in-part · filed 29 Mar 1993

Serial160,336Parent of this continuation-in-part · filed 2 Dec 1993

Serial386,766Parent of this continuation-in-part · filed 10 Feb 1995

Serial706,779Parent of this continuation · filed 3 Sep 1996

Serial827,444Parent of this continuation · filed 28 Mar 1997

Serial970,201Parent of this continuation · filed 14 Nov 1997

US 5,866,904 AParent of this continuation

US 5,594,245 AParent of this continuation-in-part

US 5,412,210 AParent of this continuation-in-part

US 5,969,357 AThis patent

From the US filing history. Foreign family members aren’t listed.

Scanning electron microscope and method for dimension measuring by using the same

Life of this patent

Scanning electron microscope and method for dimension measuring by using the same

Life of this patent

Abstract

Claims20