Double reflection electron emission microscope
AssigneeAG Focus LLC
InventorKrzystoph Grzelakowski
Life of this patent
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Abstract
Described is an electron microscope, with which different study modes can be conducted. An electron reflector is mounted in the rear focal plane of the objective lens or in one of its conjugate planes and oriented in such a manner that the primary beam coming from the electron source is focused on the specimen to be studied. The reflector tip can be made of a monocrystal or a polycrystalline material.
Claims20
Electron microscope with an electron source, with an electron optical imaging system, comprising at least one objective lens and one projector lens, and a detector which includes at least one of a phosphor screen and an electron multiplier, wherein
- at least one electron reflector is mounted in the rear focal plane of the objective lens or in one of its conjugate planes and aligned in such a manner that the primary beam coming from the electron source is focused on a specimen to be analyzed.
Dependencies are inferred from the claim text.