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US 5,969,354 AGranted
Electron analyzer with integrated optics
OwnerMichael A. Kellyinventor
Life of this patent
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OwnerMichael A. Kellyinventor
Estimating the term…
A charged-particle analyzer in which a solenoid or other means set up a generally axial magnetic field in a drift region. Meshes of magnetically permeable material are set at ends of the drift region to terminate the magnetic field. Charged particles, such as electrons, are incident upon entrance mesh at a given angle with respect to the central axis. After passing through the entrance mesh, they gyrate around the magnetic field lines, and they then exit the drift region through the exit mesh. The rotation accumulated across the drift region depends upon the energy of the incident particle, and the angle of the particle trajectory exterior of the exit mesh thus depends on the particle's energy. A charged-particle detector detects the position of the particle relative to the central axis and, hence, its energy. In one embodiment, the meshes are flat so that a uniform magnetic field is created in the drift region. In another embodiment, the meshes are curved and may act as charged-particle lenses with focal planes at the particle source and at the detector.
A charged particle energy analyzer, comprising:
A charged particle energy analyzer, comprising:
A charged particle energy analyzer, comprising:
A method of analyzing an energy of a beam of electrons, comprising the steps of:
A curved magnetic mesh forming a magnetic lens which terminates an externally generated magnetic field, the mesh comprising intersecting ribs of a magnetically field terminating material having a permanence of at least 300 and forming apertures between said ribs, said mesh being formed into a predetermined doubly curved shape.
Dependencies are inferred from the claim text.