Pressure measuring membrane with resonant element vibrating orthogonal to membrane movement
AssigneesConsorzio Abb Per Lo Sviluppo Tecnologico, ABB Kent-Taylor Limited
InventorEros De Bortoli
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Abstract
An improved device for measuring pressures, comprising a silicon membrane or diaphragm which is exposed, on its two faces, to two pressures whose difference is to be measured. A resonant element is provided on one face of the diaphragm, which is treated by selective chemical etching, and is mechanically coupled to the diaphragm so that its resonance frequency varies as a consequence of the deformation undergone by the diaphragm.
Claims21
A device for measuring a pressure, comprising a diaphragm which is installed inside a casing and is exposed, on its two faces, to two pressures whose difference is to be measured, wherein said diaphragm is formed by a silicon membrane, and a resonant element is housed within said diaphragm, said device further comprising excitation means for generating the oscillations of the resonant element and means for acquiring them, said excitation means being arranged laterally and in the same plane with respect to said resonant element, said resonant element generating, when excited by said excitation means, vibrations which are orthogonal with respect to a movement of said diaphragm.
Dependencies are inferred from the claim text.