Particle sensor

Abstract

A particle sensor includes, a sensor element including (a) a vibrating section having a mass that is sensitive to the collision of solid particles contained in a fluid with the vibrating section and (b) a detecting section for detecting the vibration of the vibrating section caused by the collision and converting the vibration to electric signals, a housing for fixing said sensor element, an inlet nozzle forming a fluid inlet, and an outlet nozzle forming a fluid outlet. In the particle sensor, the outlet nozzle is provided so that the sensor element is between the inlet nozzle and the outlet nozzle, throughholes are formed in the sensor element in at least part of the vicinity of the vibrating section, and the fluid entering the particle sensor from the inlet nozzle collides with the sensor element, passes through the throughholes and leaves the particle sensor from the outlet nozzle. The particle sensor has such a characteristic structure that the speed of a fluid colliding with the sensor element can be changed. The particle sensor can measure the sizes and particle size distribution of particles contained in a fluid, easily in a short time.

Dependencies are inferred from the claim text.