Coordinate measuring apparatus and method for controlling the same
AssigneeCarl-Zeiss-Stiftung
InventorsRalf Bernhardt, Otto Ruck, Gunter Grupp
Life of this patent
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AssigneeCarl-Zeiss-Stiftung
InventorsRalf Bernhardt, Otto Ruck, Gunter Grupp
Estimating the term…
The invention is directed to a method which is provided for controlling coordinate measuring apparatus wherein a probe head (2) is moved and has a movably attached probe unit (24) attached thereto. The probe unit (24) is charged with a measurement force Fmeas relative to the probe head (2). The measurement force Fmeas operates against the mass inertial forces Fzp which occur because of acceleration of the probe. The measurement force Fmeas is comprised of a desired measurement force Fdes and a corrective measurement force Fcorr. The desired measurement force Fdes is constant in magnitude and is directed perpendicularly to the surface of the workpiece (15) to be measured. The corrective measurement force Fcorr at least partially compensates for the mass inertial forces (Ftr, Fzp) which occur because of the acceleration of the probe unit (24).
A method for controlling a coordinate measuring apparatus including a control system and a probe head having a probe unit movably attached thereto, the method comprising the steps of:
A coordinate measuring apparatus for measuring a workpiece having a surface, the coordinate measuring apparatus comprising:
Dependencies are inferred from the claim text.