US 5,965,976 A · Gas discharge lamps fabricated by micromachined transparent substrates

Abstract

A high pressure gas discharge lamp and the method of making same utilizing integrated circuit fabrication techniques. The lamp is manufactured from heat and pressure resistant planar substrates in which cavities are etched, by integrated circuit manufacturing techniques, so as to provide a cavity forming the gas discharge tube. Electrodes are deposited in the cavity. The cavity is filled with gas discharge materials such as mercury vapor, sodium vapor or metal halide. The substrates are bonded together and channels may be etched in the substrate so as to provide a means for connection to the electrodes. Lamps having ignition enhancing and hot restrike features, as well as single-sided electrodes, are disclosed.

Claims8

Dependent claims

A gas discharge light emitting device comprising:

a) three or more substrates capable of withstanding heat and pressure;
b) said substrates arranged in a stack, each substrate contacting an adjacent substrate in the stack via confronting planar surfaces;
c) a first enclosed cavity defined by separate cavities in at least one substrate in the stack;
d) a second enclosed cavity defined by separate cavities in at least one substrate in the stack;
e) a bonded interface disposed substantially across said substrates at their confronting surfaces, except at the cavity;
f) luminescent gas discharge material disposed in the first enclosed cavity;
g) means for energizing the luminescent material in the first enclosed cavity;
h) ultraviolet light discharge material disposed in the second enclosed cavity;
and
i) means for energizing the ultraviolet light discharge material in the second enclosed cavity.

7 more elements

Dependencies are inferred from the claim text.

Gas discharge lamps fabricated by micromachined transparent substrates

Life of this patent

Gas discharge lamps fabricated by micromachined transparent substrates

Life of this patent

Abstract

Claims8