Diaphragm structure

A diaphragm structure, comprising:

• a ceramic substrate having at least two windows formed therethrough separated laterally by a partition wall, said partition wall having a lower end portion and an opposed upper end portion that terminates at an upper end surface having a width less than that of said lower end portion;
• and
• a diaphragm plate laminated on an upper surface of said ceramic substrate to cover said windows, said diaphragm plate contacting said partition wall only at said upper end surface thereof;
• wherein said upper end portion includes transition surfaces extending from sidewalls of said partition wall to said upper end surface, said transition surfaces extending substantially parallel to the plane of said diaphragm plate and cooperating with said diaphragm plate to define gaps of substantially constant thickness in communication with said windows.

A diaphragm structure, comprising:

• a ceramic substrate having at least two recesses formed in an upper surface thereof, said recesses being separated laterally by a partition wall having a lower end portion and an opposed upper end portion that terminates at an upper end surface having a width less than that of said lower end portion;
• and
• a diaphragm plate laminated on said upper surface of said ceramic substrate to cover said recesses, said diaphragm plate contacting said partition wall only at said upper end surface thereof;
• wherein said upper end portion includes transition surfaces extending from sidewalls of said partition wall to said upper end surface, said transition surfaces extending substantially parallel to the plane of said diaphragm plate and cooperating with said diaphragm plate to define gaps of substantially constant thickness in communication with said windows.