Apparatus and method for scratch wear testing of thin films
AssigneeMarton & Associates, Inc.
InventorDenes Marton
Life of this patent
Estimating the term…
Abstract
Methods and apparatus are provided for generating scratch wear resistance information on a given specimen 13 by measuring off-specular light scattering. The technique employs a focused light beam 10 that illuminates the area of the specimen surface which is scratched or otherwise altered by a stylus 5 pressed to this surface with a determined force (load). The stylus is slid along this surface with a determined speed and for a determined distance. In a preferred embodiment, the specimen is mounted on a turntable 4, and the stylus and the optical elements are stationary. The light scattering intensity is measured using a light detector 7 continuously or quasi-continuously and data is evaluated using a computer 9.
Claims24
An apparatus for testing the surface wear characteristics of a test specimen, comprising:
- a stylus for moving against the surface of the test specimen and wearing the test specimen surface along a track;
- a light source for directing a light beam as a spot having a mean diameter less than 200 microns on the track formed on the test specimen;
- a detector for detecting off-specular scattered light originating from the track in response to a light source;
- and
- a data recorder responsive to the detector for recording surface wear characteristics of the test specimen.
An apparatus for testing the surface wear characteristics of a test specimen, comprising:
- a stylus for moving against the surface of the test specimen and wearing the test specimen surface along a track;
- a light source for directing a light beam on the track formed on the test specimen;
- a light chopper for creating an intermittent incoming light beam having a selected light passing frequency;
- focusing optics for focusing the light from a light source as a spot on the test specimen;
- a detector for detecting off-specular scattered light originating from the track in response to the light beam originating from a light source;
- an amplifier for receiving signals from both the detector and the light chopper to enhance sensitivity;
- and
- a computer for collecting and processing data from the amplifier.
A method of testing the surface wear characteristics of a test specimen, comprising:
- pressing a stylus against the surface of the test specimen;
- moving the stylus relative to the surface of the test specimen and wearing the test specimen surface along a track;
- creating a light beam that is monochromatic;
- directing the light beam such that it illuminates a spot on the wear track formed on the test specimen;
- detecting off-specular scattered light originating from the track in response to the light source;
- and
- recording data from the detector.
Dependencies are inferred from the claim text.