Probe scanning apparatus for probe microscope
AssigneeSeiko Instruments Inc.
InventorAkira Inoue
Life of this patent
Estimating the term…
Abstract
A spring is connected to an edge section of a sample side of a spindle receiving a force in the Z-axial direction by a first poise coil motor, and a probe is attached to the tip of the spring. The spindle is supported by an internal tube with a spring. The movement of the spindle is enlarged by the spring to be conveyed to the probe, whereby displacement of the probe is amplified. For this reason, a resonance frequency f0 of a system comprising the movable element of the first poise coil motor, spindle, spring, spring and probe can be increased. If the spring is changed to springs in two stages, a resonance frequency f0 of the system can be increased with comparatively compact configuration.
Claims9
A probe scanning apparatus for a probe microscope used for measuring a form or physical properties of a surface of a sample by approaching or contacting the surface thereof;
- said apparatus comprising:
- a spindle supported by an elastic member and driven at least in the z-axial direction which is a vertical direction to said surface of the sample;
- and
- a probe member supported at an edge section in the side of said sample surface of said spindle through a displacement enlarging member for enlarging displacement according to movement of said spindle;
- wherein a resonance frequency of said probe scanning apparatus is enlarged.
Dependencies are inferred from the claim text.