Pressure sensor
AssigneeMKS Instruments, Inc.
InventorChristopher P. Grudzien
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AssigneeMKS Instruments, Inc.
InventorChristopher P. Grudzien
Estimating the term…
A pressure sensor has a housing for receiving a fluid whose pressure is being sensed, and an electrode assembly and a diaphragm arranged to form a variable capacitor within the housing. In one embodiment, the electrode assembly includes a dielectric disk with a conductive electrode and a standoff being formed on a surface of the disk facing the diaphragm. A spacer ring is provided between the standoff and the diaphragm so that the thickness of the spacer ring sets the gap between the electrode of the electrode assembly and the diaphragm. In another embodiment, the electrode assembly is an integral unit that includes a housing and an electrode such that lower surfaces of the housing and the electrode are coplanar to each other. In this embodiment, the spacer is between the housing and the diaphragm such that the thickness of the ring sets the length of the gap.
A pressure sensor for sensing the pressure of a fluid, the pressure sensor comprising:
A pressure sensor comprising:
A pressure sensor comprising:
A pressure sensor comprising:
Dependencies are inferred from the claim text.