Process and apparatus for the treatment of perfluorinated and hydrofluorocarbon gases for the purpose of destroying them
AssigneeL'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
InventorsJean-Christophe Rostaing, Fran.cedilla.ois Coeuret, Claude de Saint Etienne, Michel Moisan
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Abstract
A process for treating perfluorinated and/or hydrofluorocarbon gases, comprising the steps of creating an atmospheric-pressure gas plasma in at least one hollow dielectric tube; making the gases to be treated flow through the at least one dielectric tube in contact with the plasma for the purpose of dissociating molecules of the gases into reactive compounds; and reacting the reactive compounds with a corresponding reactive element for the purpose of destroying them.
Claims26
A process for treating s perfluorinated-containing gas, a hydrofluorocarbon-containing gas or a combination thereof, comprising the steps of:
- creating an atmospheric-pressure plasma in at least one hollow dielectric tube;
- making said gas to be treated flow through said at least one dielectric tube in contact with said plasma for the purpose of dissociating molecules of said gas into reactive compounds;
- and
- reacting said reactive compounds with a corresponding reactive element for the purpose of destroying them.
A plasma treatment process, comprising introducing a gas comprising a perfluorinated gas, a hydrofluorocarbon gas or a combination thereof, into a plasma treatment apparatus, forming an atmospheric pressure plasma from said gas, wherein molecules of said perfluorinated gas, said hydrofluorocarbon gas or said combination thereof are dissociated into reactive compounds, removing from the plasma treatment apparatus an effluent gas comprising said reactive compounds and reacting said reactive compounds with a corresponding reactive element for the purpose of destroying them.
Dependencies are inferred from the claim text.