Succinimide derivative, process for production and use thereof
AssigneeSumitomo Chemical Company, Limited
InventorsAkira Kamabuchi, Naoki Takeyama, Jun Tomioka, Haruyoshi Osaki
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Abstract
N-(10-camphorsulfonyloxy)-succinimide represented by the formula (I): ##STR1## is provided, which can be produced by reacting N-hydroxysuccinimide with 10-camphorsulfonic acid, a salt thereof or a halide thereof. Using the compound as an acid generating agent, a resist composition can be obtained by including an alkali-soluble resin having a protective group removable by the action of an acid; and the resist composition is excellent in heat resistance, ratio of residual film thickness after developing, uniformity of film thickness, profile, photospeed and resolution and is improved in the time delay effect and attachment of pattern.
Claims6
A process for producing N-(10-camphorsulfonyloxy)-succinimide represented by the formula (I):
- ##STR5## which comprises reacting N-hydroxysuccinimide with 10-camphorsulfonic acid, a salt thereof or a halide thereof.
Dependencies are inferred from the claim text.