Method of forming DLC films over inner surface of cylindrical member

A method of forming films over an inner surface of a cylindrical member having a bore, said method comprising:

• a first intermediate film forming process comprising steps of:
• placing the cylindrical member in a vacuum vessel;
• inserting an auxiliary electrode of a first intermediate film forming material in the bore of the cylindrical member forming the inner surface;
• keeping the cylindrical member at a ground potential, or applying a negative DC voltage is applied to the cylindrical member;
• and
• applying an AC voltage to the auxiliary electrode after evacuating the vacuum vessel to form a first intermediate film having enhanced adhesion with the cylindrical member over the inner surface of the cylindrical member by resistance heating evaporation of a first intermediate film forming material,
• a second intermediate film forming process comprising steps of:
• placing the cylindrical member having the first intermediate film formed over the inner surface thereof in the vacuum vessel;
• inserting an auxiliary electrode in the bore of the cylindrical member;
• keeping the cylindrical member at a ground potential, or applying a positive DC voltage to the cylindrical member;
• supplying a gas containing silicon or germanium into the vacuum vessel after evacuating the vacuum vessel;
• and
• applying a voltage to the cylindrical member to produce a plasma in the vacuum vessel so as to form a second intermediate film having enhanced adhesion with a diamond-like carbon (DLC) film on the first intermediate film over the inner surface of the cylindrical member by a plasma CVD process, and
• a diamond-like carbon (DLC) film forming process comprising steps of:
• placing the cylindrical member having the first and second intermediate films formed over the inner surface thereof in the vacuum vessel;
• inserting an auxiliary electrode in the bore of the cylindrical member and keeping the auxiliary electrode at a ground potential, or applying a positive DC voltage to the cylindrical member;
• supplying a gas containing carbon into the vacuum vessel after evacuating the same;
• and
• applying a voltage to the cylindrical member to produce a plasma in the vacuum vessel by a plasma CVD process in order that the diamond-like carbon (DLC) film is deposited on the second intermediate film formed over the inner surface of the cylindrical member.

A method of forming films over an inner surface of a cylindrical member having a bore, said method comprising:

• a first intermediate film forming process comprising steps of:
• placing the cylindrical member in a vacuum vessel;
• inserting an auxiliary electrode of a first intermediate film forming material in the bore of the cylindrical member forming the inner surface;
• keeping the cylindrical member at a ground potential, or applying a negative DC voltage to the cylindrical member;
• supplying a sputtering gas into the vacuum vessel after evacuating the vacuum vessel;
• and
• applying radio frequency power to the auxiliary electrode to produce a plasma around the auxiliary electrode in the bore of the cylindrical member in order that the first intermediate film forming material is sputtered from the auxiliary electrode and is deposited so as to form the first intermediate film having enhanced adhesion with the cylindrical member over the inner surface of the cylindrical member,
• a second intermediate film forming process comprising steps of:
• placing the cylindrical member having the first intermediate film formed over the inner surface thereof in the vacuum vessel;
• inserting an auxiliary electrode in the bore of the cylindrical member;
• keeping the auxiliary electrode at a ground potential, or applying a positive DC voltage to the cylindrical member;
• supplying a gas containing silicon or germanium into the vacuum vessel after evacuating the vacuum vessel;
• and
• applying a voltage to the cylindrical member to produce a plasma in the vacuum vessel so as to form a second intermediate film having enhanced adhesion with a diamond-like carbon (DLC) film on the first intermediate film over the inner surface of the cylindrical member by a plasma CVD process, and
• a diamond-like carbon (DLC) film forming process comprising steps of:
• placing the cylindrical member having the first and second intermediate films formed over the inner surface thereof in the vacuum vessel;
• inserting an auxiliary electrode in the bore of the cylindrical member and keeping the auxiliary electrode at a ground potential, or applying a positive DC voltage to the cylindrical member;
• supplying a gas containing carbon into the vacuum vessel after evacuating the same;
• and
• applying a voltage to the cylindrical member to produce a plasma in the vacuum vessel by a plasma CVD process in order that the diamond-like carbon (DLC) film is deposited on the second intermediate film formed over the inner surface of the cylindrical member.