Processing apparatus and processing method

A processing method comprising the steps of:

• (a) arranging a substrate on a spin chuck surrounded at a periphery with a double cup at least equipped with first and second concentric receiving sections;
• (b) applying a first processing liquid to a thin film formed on the substrate and rotating the substrate by the spin chuck at a first rotation speed;
• (c) without varying a relative height level between the substrate on the spin chuck and the double cup, receiving the first processing liquid centrifugally separated from the substrate and first processing liquid dropped down from the substrate by the first receiving section of the double cup and recovering the received first liquid;
• (d) without varying a relative height level between the substrate on the spin chuck and the double cup, applying a second processing liquid to the thin film while rotating the substrate at a second rotation speed different from the first rotation speed;
• and
• (e) receiving the second processing liquid centrifugally separated from the substrate by the second receiving section of the double cup and recovering the received second processing liquid, wherein the second rotation speed is greater than the first rotation speed so as to deliver the second processing liquid mainly into the second receiving section of the double cup.