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US 5,965,051 AGranted
Ceramic heating element made of molybdenum disilicide and silicon carbide whiskers
AssigneesFuji Electric Co., Ltd., Riken
InventorsNoritomo Hirayama, Nobuhisa Kato, Mutsumi Nagumo, Masahiro Uno, Yohichi Yamashita, Wan Jiang, Tetsuo Uchiyama, Kenichi Tsuji
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Abstract
A ceramic heating element includes a heat-generating portion 1 formed of a ceramic composite material with 3 to 40 vol. % of silicon carbide (SiC) whiskers and the balance substantially of molybdenum disilicide (MoSi.sub.2), and electrode portions 2a and 2b provided on both ends of the heat-generating portion 1.
Claims30
A ceramic heating element comprising:
- a heat-generating portion constituted of a ceramic composite material and electrode portions provided on both ends of said heat-generating portion,
- wherein said ceramic composite material comprises 3 to 40 vol. % of SiC whiskers and the balance of a matrix substantially of MoSi.sub.2, and
- wherein said SiC whiskers have an average diameter of 0.2 to 1.0 .mu.m and an average length of 2 to 50 .mu.m, and comprise at least 50% of SiC whiskers having an .alpha.-crystal structure or a .beta.-crystal structure with stacking faults in the direction of growth thereof, i.e., a .beta.-crystal structure with an X-ray diffraction pattern having a peak at 2.theta.=33.60.degree. but having no peak at 2.theta.=41.4.degree..
A ceramic heating element comprising:
- a heat-generating portion constituted of a ceramic composite material and electrode portions provided on both ends of said heat-generating portion,
- wherein said ceramic composite material comprises 3 to 40 vol. % of SiC whiskers and the balance of a matrix substantially of MoSi.sub.2, and
- wherein said SiC whiskers comprise at least 80% of SiC whiskers having an .alpha.-crystal structure or a .beta.-crystal structure with stacking faults in the direction of growth thereof, i.e., a .beta.-crystal structure with an X-ray diffraction pattern having a peak at 2.theta.=33.6.degree. but having no peak at 2.theta.=41.4.degree..
A ceramic heating element, comprising:
- a body of a ceramic composite material having a heat-generating portion and electrode portion provided on both ends of said heat-generating portion;
- and
- platinum wires that are fusion bonded to the electrode portions of the body of ceramic composite material,
- wherein said ceramic composite material 3 to 40 vol. % of SiC whiskers and the balance of a matrix substantially of MoSi.sub.2, and
- wherein said SiC whiskers comprise at least 50% of SiC whiskers having an .alpha.-crystal structure or a .beta.-crystal structure with stacking faults in the direction of growth thereof, i.e., a .beta.-crystal structure with an X-ray diffraction pattern having a peak at 2.theta.=33.6.degree. but having no peak at 2.theta.=41.4.degree..
2 more elements
Dependencies are inferred from the claim text.