Method and apparatus for baking out a gate valve in a semiconductor processing system

A heating device for mounting on a gate valve in a semiconductor processing system, said gate valve including a first rib extending outward, said heating device comprising:

• a first heat conducting body adapted to contact a first exterior portion of said gate valve;
• a second heat conducting body adapted to contact a second exterior portion of said gate valve that is spaced a distance away from said first exterior portion of said gate valve;
• a first heating element affixed to said first heat conducting body;
• a second heating element affixed to said second heat conducting body;
• a first shell connected to said first and second heat conducting bodies;
• and
• a first channel between said first and second heat conducting bodies and between said first and second heating elements, wherein said channel is positioned to receive said first rib between said first and second heat conducting bodies.

A device for heating a gate valve in a semiconductor processing system, said gate valve having an outer surface, comprising:

• a first body having a first surface and a second surface, wherein said first surface is adapted to contact said outer surface of said gate valve;
• a second body spaced apart from said first body, said second body having a third surface and a fourth surface, wherein said third surface is adapted to contact said outer surface of said gate valve;
• a first heating element attached to said second surface of said first body;
• a second heating element attached to said fourth surface of said second body;
• an outer housing connected to said first body and said second body, wherein said outer housing is sized to cover at least a portion of a rib extending outward on said gate valve, said rib disposed between said first and second bodies;
• insulation disposed between said first and second heating elements and said outer housing;
• and
• a gap located between said heating elements and said insulation.

A device for heating a gate valve, said gate valve having first and second outer surfaces, said heating device comprising:

• a first frame section including a first outer shell and a first rigid contact plate coupled to said first outer shell, said first rigid contact plate having a flat surface adapted to contact said first gate valve outer surface, and a first heating element connected to said first rigid contact plate;
• a second frame section including second outer shell and a second rigid contact plate coupled to said second outer shell, said second rigid contact plate having a flat surface adapted to contact said second gate valve outer surface, and a second heating element connected to said second rigid contact plate;
• and
• a removable fastener adapted to fit over a portion of said first and second outer shells and force said first rigid contact plate against said first outer surface of said gate valve and said second rigid contact plate against said second outer surface of said gate valve;
• wherein said first frame section is sized to accommodate at least one rib extending outward from said first gate valve outer surface and said first frame section further includes at least one support post which is attached to said first outer shell section, said support post being sized to fit into an opening in a rib and position said first frame section on said gate valve.

A device for heating a gate valve, said gate valve having first and second outer surfaces, said heating device comprising:

• a first frame section including a first outer shell and a first rigid contact plate coupled to said first outer shell, said first rigid contact plate having a flat surface adapted to contact said first gate valve outer surface, and a first heating element connected to said first rigid contact plate;
• a second frame section including second outer shell and a second rigid contact plate coupled to said second outer shell, said second rigid contact plate having a flat surface adapted to contact said second gate valve outer surface, and a second heating element connected to said second rigid contact plate;
• a third rigid contact plate and third heating element disposed within said first frame section, said third rigid contact plate connected to said first outer shell, said third heating element connected to said third contact plate;
• a fourth contact plate and fourth heating element disposed within said second frame section, said fourth rigid contact plate connected to said second outer shell, said fourth heating element connected to said fourth contact plate;
• said first and third rigid contact plates being separated from one another by a first channel;
• wherein said first channel is sized to accept a first rib extending out from said first gate valve outer surface;
• said second and fourth rigid contact plates being separated from one another by a second channel;
• wherein said second channel is sized to accept a second rib extending out from said second gate valve outer surface;
• an insulating material disposed between said first rigid contact plate and said first outer shell;
• and
• a removable fastener adapted to fit over a portion of said first and second outer shells and force said first rigid contact plate against said first outer surface of said gate valve and said second rigid contact plate against said second outer surface of said gate valve.