IC test equipment, measurement method in the IC test equipment, and storage medium of the same

A measurement method in an IC test equipment comprising the steps of:

• generating a test signal for testing a device under test and outputting the test signal to each of a plurality of devices under test;
• selecting an arbitrary device under test out of a plurality of the devices under test and controlling to put the selected device under test into a state that a measurement is ready to be started;
• converting a measurement signal that the selected device under test outputs after performing a specific operation by the test signal into a measurement data that a storage means can store;
• instructing a timing at which the storage means stores an optimum measurement data representing a test result of the selected device under test, on the basis of a timing data to indicate a timing at which the measurement data is inputted to the storage means;
• storing correction data for correcting the timing data by each of a plurality of the devices under test in a correction data storage means;
• selecting a correction data corresponding to the selected device under test out of the correction data by each of a plurality of the devices under test, which are stored in the correction data storage means;
• and
• correcting the timing data on the basis of the correction data and instructing a timing at which the storage means stores the measurement data.

A storage medium containing a program that a computer can execute, the storage medium comprising the computer-executable program codes for:

• generating a test signal for testing a device under test and outputting the test signal to each of a plurality of devices under test;
• selecting an arbitrary device under test out of a plurality of the devices under test and controlling to put the selected device under test into a state that a measurement is ready to be started, and selecting a correction data corresponding to the selected device under test out of the correction data by each of a plurality of the devices under test, which are stored in a correction data storage means;
• converting a measurement signal that the selected device under test outputs after performing a specific operation by the test signal into a measurement data that a storage means can store;
• and
• correcting a timing data to indicate a timing at which the measurement data is inputted to the storage means on the basis of the selected correction data, and instructing a timing at which the storage means stores an optimum measurement data representing a test result of the selected device under test.

Test equipment to test a plurality of devices under test in parallel, comprising:

• a controller for outputting a control signal indicating which of the plurality of devices in parallel to test and outputting number data for the device being tested;
• a first clock generator for receiving the control signal from the controller and outputting an enable signal to bring the device to be tested into an enabled state;
• a pattern generator for outputting a pattern signal to each of the devices under test;
• a judgment circuit receiving a measurement signal from the device under test, and converting the measurement signal to measurement data which is outputted;
• a register circuit receiving the measured data from the judgment circuit;
• a data generating circuit outputting a minimum value of timing for a clock signal;
• a data correction circuit for receiving the number data from the controller and outputting a time correction value for the number data corresponding to the device under test;
• an adding circuit for adding the minimum value from the data generating circuit and the time correction value from the data correction circuit to produce a timing signal;
• and
• a second clock generator receiving the timing signal from the adding circuit to output a second clock signal.