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US 5,964,629 AGranted
Method of fabricating a field emission display device having a silicon tip
AssigneeElectronics and Telecommunications Research Institute
InventorsJong Moon Park, Jin Keon Ku, Ki Hong Kim, Yeong Cheol Hyeon, Min Park
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Abstract
To form a silicon tip having an undercut, a photoresist pattern having a vertical profile or a positive profile is formed on a silicon substrate and an under-cuted isotropic etching process is then performed using the photoresist pattern as a mask. First and second insulation films are formed on the silicon tip and the silicon substrate except for the silicon tip. The first insulation film is then separated from the second insulation film.
Claims7
A method of fabricating a field emission display device, comprising the steps of:
- forming a photoresist pattern on a selected portion of a silicon substrate;
- performing a first etching process using said photoresist pattern as a mask to form a silicon tip having an undercut;
- removing said photoresist pattern, thereby forming a silicon tip;
- depositing an insulation film so that a first insulation film is formed on said silicon tip and a second insulation film is formed on said silicon substrate except for said silicon tip, wherein said first insulation film is separated from said second insulation film;
- performing a thermal oxidation process to form a thermal oxide film on said silicon tip;
- forming a metal layer on said first and second insulation film;
- and
- performing a second etching process to remove said thermal oxide film, said first insulation film and said metal layer formed on said first insulation film, and a portion of said second insulation film overlying said silicon substrate, thereby forming a sharp silicon tip.
5 more elements
Dependencies are inferred from the claim text.