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US 5,964,230 AGranted
Solvent purge mechanism
AssigneeAir Products and Chemicals, Inc.
InventorsGeorge Oleg Voloshin, Robert Sam Zorich
Life of this patent
Estimating the term…
Abstract
Apparatus and process for solvent purging a process line of process chemical in a process chemical delivery system typically used to dispense toxic chemicals from replaceable process chemical containers in the electronic fabrication industry.
Claims12
Apparatus for cleaning the interior of a process chemical distribution system, comprising:
- a) a process line connected to a source of process chemical and a downstream process chemical use station, said process line having a process valve to control the passage of said process chemical through said process line;
- b) a source of solvent capable of at least partially dissolving said process chemical;
- c) a vent line connected to said process line, capable of receiving said solvent and having a vent valve for controlling removal of solvent through said vent line;
- and
- d) a solvent delivery line connected to said source of solvent and to said process line, having an outlet which is coaxially aligned inside said process line to permit dispensing of solvent from said solvent delivery line into said process line and having a solvent valve for controlling said dispensing of solvent from said source of solvent through said solvent delivery line into said process line.
2 more elements
Apparatus for cleaning the interior of a process chemical distribution system, comprising:
- a) a process line connected to a source of process chemical and a downstream process chemical use station, said process line having a first process valve adjacent said source of process chemical and a second process valve adjacent said process chemical use station to control the passage of said process chemical through said process line;
- b) a source of solvent capable of at least partially dissolving said process chemical, said source of solvent connected to a source of push gas through a push gas valve;
- c) a vent line connected to said process line, capable of receiving said solvent and having vent valve for controlling removal of solvent through said vent line, said vent valve having upstream and downstream orifices and a vent storage vessel controllably connected to said vent line adjacent said upstream orifice and adjacent said downstream orifice;
- and
- d) a solvent delivery line connected to said source of solvent and to said process line, having an outlet which is coaxially aligned inside said process line to permit dispensing of solvent from said solvent delivery line into said process line and having a first solvent valve for controlling said dispensing of solvent from said source of solvent through said solvent delivery line into said process line and having a second solvent valve adjacent said first solvent valve and a third solvent valve adjacent said process line and a source of purge gas is connected to said solvent delivery line between said second and third solvent valve.
2 more elements
Dependencies are inferred from the claim text.