Method of producing thin film solar cell

A method for producing a thin film solar cell comprising:

• preparing a first substrate comprising a metallurgical grade material and having opposed front and rear surfaces;
• successively forming an insulating film, an active layer, and a cap layer on the front surface of the first substrate;
• adhering the cap layer to a first supporting plate and completely removing by etching the first substrate from the rear surface of the first substrate;
• disposing the laminated insulating film and active and cap layers on a heat resistant base having a impurity diffusion coefficient, with the insulating film in contact with the heat resistant base, and annealing the laminated layers to increase the crystalline grain size of the active layer;
• removing the heat resistant base from the laminated layers and disposing the laminated layers on a second substrate comprising a metallurgical grade material;
• removing the first supporting plate and the cap layer to expose the surface of the active layer;
• forming an anti-reflection film on the active layer, the anti-reflection film reducing reflection of incident light;
• forming a surface electrode in contact with the active layer;
• adhering the active layer to a second supporting plate and selectively etching the second substrate from the rear surface to form a supporting substrate supporting the active layer;
• and
• forming a rear electrode on the rear surface of the supporting substrate contacting the active layer.