Method of making semiconductor laser with inverted mesa shaped ridge with cervical surface
AssigneeFuji Photo Film Co., Ltd.
InventorHideki Asano
Life of this patent
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Abstract
A semiconductor laser has a first conduction type clad layer, an active layer and a second conduction type clad layer formed on a first conduction type semiconductor substrate in this order. An inverted mesa-shaped ridge is formed on a part of the second conduction type clad layer and a first conduction type current stopping layer is formed on each side of the ridge. Each side of the inverted mesa-shaped ridge is curved into a concave surface in a plane perpendicular to the longitudinal direction of the ridge.
Claims6
A method of producing a semiconductor laser comprising the steps of forming at least a first conduction type clad layer, an active layer and a second conduction type clad layer on a first conduction type semiconductor substrate in this order, selectively forming insulating film in a striped pattern on the second conduction type clad layer, forming an inverted mesa-shaped ridge by etching a part of the second conduction type clad layer using the insulating film as a mask and forming a first conduction type current stopping layer on each side of the ridge, wherein the improvement comprising
- the step of curving each side of the inverted mesa-shaped ridge into a concave surface in a plane perpendicular to the longitudinal direction of the ridge.
Dependencies are inferred from the claim text.