US 5,963,753 A · Substrate processing apparatus

Abstract

A substrate processing apparatus comprises a first substrate transfer unit having a first transfer path and a second substrate transfer unit having a second transfer path. A spin coating unit and a spin developing unit are arranged along the first transfer path, and a substrate cassette is arranged along the second transfer path. A substrate transport robot of the second substrate transfer unit selectively introduces a substrate received from a substrate transport robot of the first substrate transfer unit in one of external exposure apparatuses arranged on both end portions of the second transfer path, and discharges the substrate from the exposure apparatus for transfering the same to the substrate transport robot of the first substrate transfer unit. Thereby the substrate processing apparatus can avoid or relieve reduction of operational efficiency even if its throughput is different from that of an exposure apparatus.

Claims21

Dependent claims

A substrate processing apparatus comprising:

a) a processing section comprising:
a-1) substrate processing means for processing a substrate;
b) a transfer section provided adjacent to said processing section and comprising:
b-1) a transfer path defined along one side of said processing section;
and
b-2) transfer means movable along said transfer path for transferring said substrate between said processing section and both terminals of said transfer path, said transfer means being capable of introducing and discharging a substrate into and from said transfer path at both terminals of said transfer path, said transfer means comprising:
b-2-1) first substrate-transfer means capable of having access to said substrate processing means and said substrate station;
and
b-2-2) second substrate-transfer means comprising:
a first transfer unit capable of having access to one terminal of said transfer path;
and
a second transfer unit capable of having access to the other terminal of said transfer path;
and
c) a substrate station provided on an opposite side of said processing section across said transfer path.

11 more elements

A substrate processing apparatus

comprising:
a) a processing section comprising:
a-1) substrate processing means for processing a substrate;
b) a transfer section provided adjacent to said processing section and comprising:
b-1) a transfer path defined long one side of said processing section;
and
b-2) transfer means movable along said transfer path for transferring said substrate between said processing section and both terminals of said transfer path, said transfer means being capable introducing and discharging a substrate into and from said transfer path in both terminals of said transfer path at both terminals of said transfer path;
said transfer means comprising:
b-2-1) first substrate-transfer means capable of having access to said substrate station;
b-2-2) second substrate-transfer means comprising:
a first transfer means capable of having access to one terminal of said transfer path, and
a second transfer unit capable of having access to the other terminal of said transfer path;
and
b-2-3) third substrate means capable of having access to said substrate processing means, said first substrate-transfer means and said second substrate means;
and
c) a substrate station provided on an opposite side of said processing section across said transfer path.

13 more elements

Dependencies are inferred from the claim text.

Substrate processing apparatus

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Substrate processing apparatus

Life of this patent

Abstract

Claims21