Optical position measuring device
AssigneeDr. Johannes Heidenhain GmbH
InventorsJan Braasch, Christian Callimici, Michael Allgauer
Life of this patent
Estimating the term…
Abstract
An optical position measuring device, in particular for a drive for precise positioning, is recited, which comprises two drive units which are movable in respect to each other, wherein one of the two drive units has a graduation as an integral component. The latter can be scanned by a scanning unit connected with the other drive unit for generating position-dependent output signals. The graduation is directly or indirectly disposed on a level surface of the drive unit, from which a distance between the two drive units is created in such a way that by the cooperation of the two drive units the generation of a defined relative movement between the two drive units is possible.
Claims30
An optical position measuring device for a drive for precise positioning, comprising:
- a first drive unit and a second drive unit which are movable in respect to each other, wherein the first drive unit comprises a graduation as an integral part, which can be scanned by a scanning unit connected with the second drive unit for generating position-dependent output signals, and the graduation is directly or indirectly arranged on a level surface of the first drive unit, from which a distance (d) results between the first and second drive units in such a way that by a cooperation of the first and second drive units the generation of a defined relative movement between the first and second drive units is possible;
- and
- wherein the graduation is disposed on a layer on the level surface, used as the graduation foundation of the first drive unit, and the thickness of the layer used as the graduation foundation, inclusive of the graduation, has been selected such, that a cooperation of the first drive unit with the second drive unit, which is movable in relation to the first drive unit, is possible.
An optical position measuring device for a drive for precise positioning, comprising:
- a first drive unit and a second drive unit which are movable in respect to each other, wherein the first drive unit comprises a graduation as an integral part, which can be scanned by a scanning unit connected with the second drive unit for generating position-dependent output signals, and the graduation is directly or indirectly arranged on a level surface of the first drive unit, from which a distance (d) results between the first and second drive units in such a way that by a cooperation of the first and second drive units the generation of a defined relative movement between the first and second drive units is possible;
- and
- wherein the graduation is disposed, at least in partial areas, directly on the level surface of the first drive unit.
An optical position measuring device for a drive for precise positioning, comprising:
- a first drive unit and a second drive unit which are movable in respect to each other, wherein the first drive unit comprises a graduation as an integral part, which can be scanned by a scanning unit connected with the second drive unit for generating position-dependent output signals, and the graduation is directly or indirectly arranged on a level surface of the first drive unit, from which a distance (d) results between the first and second drive units in such a way that by a cooperation of the first and second drive units the generation of a defined relative movement between the first and second drive units is possible;
- wherein the graduation is disposed on a layer on the level surface, used as the graduation foundation of the first drive unit, and the thickness of the layer used as the graduation foundation, inclusive of the graduation, has been selected such, that a cooperation of the first drive unit with the second drive unit, which is movable in relation to the first drive unit, is possible;
- and
- wherein the graduation foundation and the graduation are associated with a drive stator unit, which comprises spatially structured areas with rises and recesses between them, which are periodically arranged in one or two dimensions.
An optical position measuring device for a drive for precise positioning, comprising:
- a first drive unit and a second drive unit which are movable in respect to each other, wherein the first drive unit comprises a graduation as an integral part, which can be scanned by a scanning unit connected with the second drive unit for generating position-dependent output signals, and the graduation is directly or indirectly arranged on a level surface of the first drive unit, from which a distance (d) results between the first and second drive units in such a way that by a cooperation of the first and second drive units the generation of a defined relative movement between the first and second drive units is possible;
- wherein the graduation is disposed on a layer on the level surface, used as the graduation foundation of the first drive unit, and the thickness of the layer used as the graduation foundation, inclusive of the graduation, has been selected such, that a cooperation of the first drive unit with the second drive unit, which is movable in relation to the first drive unit, is possible;
- and
- wherein the graduation foundation and the graduation are associated with a drive stator unit which comprises areas of a defined magnetization pattern, which is periodically arranged in one or two dimensions.
Dependencies are inferred from the claim text.