Ellipsometer
OwnerKatsuya Masaoinventor
Life of this patent
Estimating the term…
Abstract
The present invention discloses an ellipsometer using incident light having a wide beam diameter, comprising: a collimator for making the light parallel; a polarizer for transforming the light into a suitable linearly polarized state and radiating onto the sample; a beam expander for expanding the light to the size required for a single measurement; an objective lens composed of an afocal lens system for capturing the light reflected from the sample; an analyzer for converting the reflected light to suitable linearly polarized light; an imaging lens composed of an afocal lens system for forming an image of the sample on a image sensor; and, a image sensor; whereby, measurement of the polarized light can be performed at high speed and high resolution.
Claims10
An ellipsometer for measuring a sample, comprising:
- a light source that radiates light;
- a collimator for making incident light parallel;
- a polarizer for converting said light into linearly polarized light and radiating said polarized light onto the sample;
- an objective lens system for receiving light reflected from said sample, said objective lens system including an afocal lens system;
- an analyzer for converting said reflected light into linearly polarized light;
- an imaging lens system for forming an image of the sample on an image sensor, said imaging lens system including an afocal lens system;
- and, an image sensor for detecting the image of said sample.
Dependencies are inferred from the claim text.