Illumination system and exposure apparatus
AssigneeCanon Kabushiki Kaisha
InventorSatoru Mizouchi
Life of this patent
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Abstract
An illumination system includes an optical integrator having an element lenses arrayed in a direction perpendicular to an optical axis, and an optical system for directing lights from the element lenses of the integrator t a surface to be illuminated, wherein the element lenses include particular element lenses having different optical characteristics which are determined so that upon the surface to be illuminated those lights from the particular element lenses are partly superposed one upon another to provide a non-uniform illuminance ditribution on the surface with respect to a predetermined direction.
Claims23
An illumination system, comprising:
- an optical integrator having element lenses arrayed in a direction perpendicular to an optical axis;
- and
- an optical system for Koehler-illuminating a surface to be illuminated, with light from said element lenses of said integrator,
- wherein said element lenses include particular element lenses having different optical characteristics which are determined so that upon the surface to be illuminated those lights from said particular element lenses are partly superposed one upon another to provide an illuminance distribution having a higher intensity at a central portion thereof and a lower intensity at a peripheral portion thereof on the surface with respect to a predetermined direction.
A device manufacturing method for printing a device pattern of a mask onto a substrate, said method comprising:
- providing an optical integrator having element lenses arrayed in a direction perpendicular to an optical axis;
- and
- Koehler-illuminating, with an optical system, a mask to be illuminated, with light from the element lenses of the integrator to project a pattern of the mask onto a substrate for printing a device pattern of the mask on the substrate,
- wherein the element lenses include particular element lenses having different optical characteristics which are determined so that upon the surface to be illuminated those lights from the particular element lenses are partly superposed one upon another to provide an illuminance distribution having a higher intensity at a central portion thereof and a lower intensity at a peripheral portion thereof on the surface with respect to a predetermined direction.
Dependencies are inferred from the claim text.